In contrast to some other processes laser operates using high energy photons therefore there is not a typical tool as the laser beam directly targets. By sem we compared machining quality obtained in correspondence to the most significant process conditions. A beam quality parameter is m2 number θw λ π the minimum spot diameter of a beam δis given by δ 4 π m2 λ f d for micromachining smallest spot size is obtained when m2 1.
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